2, CEA, Gif-sur-Yvette, , France
3, Ecole Polytechnique, Palaiseau, , France
4, Université Paris-Saclay, Orsay, , France
Development of materials and engineering solutions in fusion technologies support the use of high-Z elements as Plasma Facing Component. Tungsten is among the most promising candidates for these applications. It is then important to assess the structure and strain of thick W coatings as those parameters influence the adhesion on various substrates. Glancing incidence X-ray diffraction can be used to study W polycrystalline textured films, obtain information about their structure, and establish a depth profiling of residual strain. The actual strain at different depths within the coating can be extracted from the measured averaged strain using the inverse Laplace transform method applied to a set of measurements at different angles of the impinging X-ray beam. This work was supported by grant Investissements d’Avenir of LabEx PALM (ANR-10- LABX-0039-PALM) and by the Region Ile-de-France in the framework of DIM Nano-K.