3, The University of Texas at Dallas, Dallas, Texas, United States
1, The University of Texas at Dallas, Richardson, Texas, United States
4, Universidad de Sonora, Hermosillo, Sonora, Mexico
5, The University of Texas at San Antonio, San Antonio, Texas, United States
6, King Abdullah University of Science & Technology, Thuwal, , United Arab Emirates
The C 1s peak’s electron binding energy in X-ray photoelectron spectroscopy (XPS) analysis of crystalline diamond and diamond films has been extensively investigated. The splitting of the C 1s peak is usually reported as the combination of C 1s/sp3 and C 1s/sp2 bonding in the sample. In this work, we present a systematic XPS C 1s study of the polycrystalline diamond films as well as single crystal diamond (SCD). We demonstrate that the lower energy peak, present in C 1s, and usually related to sp2 bonding, is the result of Ar incorporation in the sp3 lattice, identified in this paper as CD-Ar peak. The correlation of the CD-Ar peak and the Ar+ beam energy as well as the concentration of Ar in the lattice is discussed. The incorporation of Ar in the samples have been demonstrated as well with high resolution transmission electron microscopy (HRTEM) and Rutherford back scattering (RBS).