Metallic nanostructures (NSs) has been broadly used in various chemical, biological, and optical applications due to the localized surface plasmon resonance, which can efficenty controlled with variations of configuration, shape, and density. In this paper, the systematic controls of the configuration and size of self-assembled metallic NSs are investigated on various semiconductor substrates via sysmatic control over deposition thickness, annealing temperature, and annealing duration. With the increased deposition thickness, the size explosion of metallic NSs are equally observed with the density decrease for each substrate. Ac clear morphological evolution from the dome shape to hexagnal shape of was investigated with the deposition thickness increase, which can be induced by the surface energy orientation during the nucleation of the NSs based on a combination of Wolmer-Weber growth model and surface energy minimization mechanism. [1-2] With the increased temperature, the metallic NSs generally evolve with three regims: Nucleation, irregular nano-mounds, and individual NSs, which can be explained by the diffusion theory and solid-state dewetting mechanism. [3-4] With the increased duration, the Ostwald ripening can intially occur and saturate at the relatively longer time. Meanwhile, depending on the substate, the evolution of metallic NSs are totally distinct due to effect of the surface condition as well as the surface enrgy.