Kumar Ankit1 2 Benjamin Derby3 Amit Misra3 Michael Demkowicz1

1, Texas A&M University, College Station, Texas, United States
2, Arizona State University, Tempe, Arizona, United States
3, University of Michigan-Ann Arbor, Ann Arbor, Michigan, United States

Experiments have demonstrated a rich variety of self-organized nanoscale concentration modulations in physical vapor deposited films of phase separating binary alloys. However, no comprehensive model capable of predicting the entire spectrum of these self-organized nanostructures as a function of material and processing parameters has yet been formulated. As the first step in this direction, we adopt a 3D phase-field approach to numerically investigate the role of deposition rates and separation kinetics on the morphological self-structuring in representative binary vapor-deposited alloys. Film coarsening characteristics are explored by comparing computational results with corresponding annealing studies. We propose new strategies for morphology control based on insights gained from experimental and computational studies.