Zhongwei Gao1 Chih-hung Chang1

1, CBEE Oregon State University, Corvallis, Oregon, United States

In this study, we developed a method to fabricate a patterned films by using a combination of microreactor-assisted nanoparticle deposition (MAND) process and microfluidic channels. The MAND process is capable of generating nanoscale building blocks with controlled sizes, ranging from molecule clusters to nanoparticles, which allows for a more controlled and precise growth of nanostructures. Those nanomaterials serve as building blocks that can be delivered to the substrate surface through the microfluidic channels for a patterned film growth. The microfluidic channels are made of cured polydimethylsiloxane (PDMS) by using a replication from a patterned SU-8 photoresist-coated wafer. By combining the two process together, ZnO nanorods were successfully deposited on glass substrate. The mass transfer and the deposition mechanisms and kinetics were also studied. The scaling up for the MAND was achieved by numbering-up the microchannel unit operations in parallel, allowing for the deposition of the films on various scales.